At the recent UT System Research and Technology Transfer Showcase in Austin
are (from left) Ruben Lopez (UTSA Office of the Associate Vice President for
Research), Dhiraj Sardar (UTSA professor of physics), Arjuna Sanga (interim
vice chancellor, UT System Office of Research and Technology), Tony Sayka
(process engineer, Maxim Integrated Products of San Antonio), Arturo Ayon
(UTSA associate professor of electrical engineering) and UT System Chancellor
UTSA research highlighted in international magazines
By Kris Rodriguez
Public Affairs Specialist
(March 23, 2007)--Research results generated from the UTSA Laser Laboratory were recently featured in two international magazines, Semiconductor Manufacturing (China) and Controlled Environments.
In the January issue of Semiconductor Manufacturing, an article outlined UTSA researchers' findings that show minimal absorption of laser light through polymides, which are thin coatings on semiconductor wafers that help absorb shock and prevent cracking of integrated circuits on wafers if they are dropped. The study proved that photosensitive polymides are a superior stress-buffer product.
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In the December issue of Controlled Environments, the UTSA Laser Lab was featured in an article on an efficient method of wafer cleaning using ultrasonic energy. The research work was based on the wafer-cleaning patent, "Apparatus and Method for Cleaning a Wafer," that was conceived by four researchers working in the UTSA Laser Lab and is now owned by the University of Texas System.
The patent authors are Dhiraj Sardar, professor of physics and supervisor of the UTSA
Laser Lab, UTSA graduate students Raylon Yow and Fred Barrera, and Tony Sayka, process engineer at Maxim Integrated Products of San Antonio.
According to Sayka, the wafer-cleaning process develop by the team breaks new ground by using ultrasonic energy at varying frequencies and high-pressure liquids to clean and remove particles on wafers that contain circuits used in computers, wireless devices and other products.
"This patent is very significant for the semiconductor industry because it provides a safe and efficient method of cleaning semiconductor wafers," said Sayka.
The invention can be used to reduce the level of particles contamination on a wafer. Cleaner wafers result in higher yields, and any increase in yield is desirable because it means more potential revenue per wafer.
Sardar and Sayka discussed the wafer-cleaning patent at the UT System Research and Technology Transfer Showcase last month in Austin featuring high-profile research in progress at UT System campuses.
Showcase participants and presentations included rover robots designed and constructed by the students of Mo Jamshidi, UTSA professor of electrical engineering; research on improved drug-delivery on cardiac stents from implants led by Mauli Agrawal, dean of the UTSA College of Engineering, and David Johnson, UTSA assistant professor of chemistry; and an invention to detect early eye disease by Andrew Tsin, UTSA professor of biology.
At the conference, Mauli Agrawal received the Chancellor's Entrepreneurship and Innovation Award from the UT System Office of Research and Technology Transfer.